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Etching of new phase change material Ti0.5Sb2Te3 by Cl-2/Ar and CF4/Ar inductively coupled plasmas 期刊论文
Applied Surface Science, 2014, 卷号: 311, 期号: 8, 页码: 68-73
Authors:  Zhang, Zhonghua;  Song, Sannian;  Song, Zhitang;  Cheng, Yan;  Zhu, Min;  Li, Xiaoyun;  Zhu, Yueqin;  Guo, Xiaohui;  Yin, Weijun;  Wu, Liangcai;  Liu, Bo;  Feng, Songlin;  Zhou, Dong
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Phase Change Material  Ti-sb-te  Etching  Icp