Preparation and thermal-sensitive characteristic of copper doped n-type silicon material
Fan Yanwei; Zhou Bukang; Wang Junhua; Chen Zhaoyang; Chang Aimin
2015
发表期刊Journal of Semiconductors
卷号36期号:1页码:013004 (4 pp.)
摘要

Copper doped n-type single-crystal silicon materials are prepared by a high temperature diffusion process. The electrical and thermal-sensitive characteristic of materials is investigated under different experimental conditions. The results show that the maximum resistivity of 46.2 Omega.cm is obtained when the sample is treated at 1200 degC for 2 h with the surface concentration of the copper dopant source being 1.83 times 10-7 mol/cm2. The copper doped n-type silicon material presents a negative temperature-sensitive characteristic and the B values are about 3010-4130 K.

DOI10.1088/1674-4926/36/1/013004
收录类别SCI
引用统计
文献类型期刊论文
条目标识符http://ir.xjipc.cas.cn/handle/365002/5190
专题新疆维吾尔自治区电子信息材料与器件重点实验室
作者单位Xinjiang Key Lab. of Electron. Inf. Mater. & Devices, Xinjiang Tech. Inst. of Phys. & Chem., Urumqi, China.
推荐引用方式
GB/T 7714
Fan Yanwei,Zhou Bukang,Wang Junhua,et al. Preparation and thermal-sensitive characteristic of copper doped n-type silicon material[J]. Journal of Semiconductors,2015,36(1):013004 (4 pp.).
APA Fan Yanwei,Zhou Bukang,Wang Junhua,Chen Zhaoyang,&Chang Aimin.(2015).Preparation and thermal-sensitive characteristic of copper doped n-type silicon material.Journal of Semiconductors,36(1),013004 (4 pp.).
MLA Fan Yanwei,et al."Preparation and thermal-sensitive characteristic of copper doped n-type silicon material".Journal of Semiconductors 36.1(2015):013004 (4 pp.).
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Preparation and ther(497KB)期刊论文作者接受稿开放获取CC BY-NC-SA浏览 请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Fan Yanwei]的文章
[Zhou Bukang]的文章
[Wang Junhua]的文章
百度学术
百度学术中相似的文章
[Fan Yanwei]的文章
[Zhou Bukang]的文章
[Wang Junhua]的文章
必应学术
必应学术中相似的文章
[Fan Yanwei]的文章
[Zhou Bukang]的文章
[Wang Junhua]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Preparation and thermal-sensitive characteristic of copper doped n-type silicon material.pdf
格式: Adobe PDF
此文件暂不支持浏览
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。