Oxidation mode on charge transfer mechanism in formation of Mn-Co-Ni-O spinel films by RF sputtering
Shi, Q (Shi, Qin); Ren, W (Ren, Wei); Kong, WW (Kong, Wenwen); Wang, L (Wang, Lei); Ma, C (Ma, Chao); Xu, JB (Xu, Jinbao); Chang, AM (Chang, Aimin); Jiang, CQ (Jiang, Chunqi)
2017
Source PublicationJOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
ISSN0957-4522
Volume28Issue:18Pages:13659-13664
Abstract

Series of negative temperature coefficient Mn-Co-Ni-O spinel oxide thin films were successfully prepared on thermally oxidized SiO2/Si (100) substrates by RF sputtering a Mn-Co-Ni metal alloy target with the sputtering gas of different Ar:O-2 partial pressure ratios. The crystallinity of the spinel films was improved as O-2 contents increased. The film conductivity was reduced. The minute variation in an optical absorption peak at around 1.7 eV by spectroscopic ellipsometry may be ascribed to the different charge transfer mechanism between Co2+ in tetragonal and Co3+ in octahedral or between O2- and Mn4+ in octahedral sites. Raman and XPS results provided further evidences.

DOI10.1007/s10854-017-7208-8
Indexed BySCI
WOS IDWOS:000409027000050
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.xjipc.cas.cn/handle/365002/5111
Collection中国科学院特殊环境功能材料与器件重点试验室
材料物理与化学研究室
Corresponding AuthorKong, WW (Kong, Wenwen); Chang, AM (Chang, Aimin)
Affiliation1.Chinese Acad Sci, Key Lab Funct Mat & Devices Special Environm, Xinjiang Key Lab Elect Informat Mat & Devices, Xinjiang Tech Inst Phys & Chem, Urumqi 830011, Peoples R China
2.Shihezi Univ, Dept Phys, Shihezi 832003, Peoples R China
3.Chengdu Technol Univ, Coll Elect Engn, Chengdu 611730, Sichuan, Peoples R China
4.Old Dominion Univ, Dept Elect & Comp Engn, Norfolk, VA 23529 USA
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GB/T 7714
Shi, Q ,Ren, W ,Kong, WW ,et al. Oxidation mode on charge transfer mechanism in formation of Mn-Co-Ni-O spinel films by RF sputtering[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2017,28(18):13659-13664.
APA Shi, Q .,Ren, W .,Kong, WW .,Wang, L .,Ma, C .,...&Jiang, CQ .(2017).Oxidation mode on charge transfer mechanism in formation of Mn-Co-Ni-O spinel films by RF sputtering.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,28(18),13659-13664.
MLA Shi, Q ,et al."Oxidation mode on charge transfer mechanism in formation of Mn-Co-Ni-O spinel films by RF sputtering".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 28.18(2017):13659-13664.
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