0.5BaZr0.2Ti0.8O3-0.5Ba 0.7Ca0.3TiO3 thin films have been deposited on Pt/Ti/SiO2/Si substrates by a modified sol-gel technique. The samples are well-crystallized perovskite ferroelectrics at room temperature, with good surface topography. Optical properties of these films in the 280-850 nm wavelength range have been investigated by spectroscopic ellipsometry at room temperature. The measured ellipsometry parameters are well fitted by Tauc-Lorentz oscillator dispersion formula. As the wavelength increases, the refractive index and extinction coefficient rise in the beginning and then descend, with a peak at about 300 nm. The calculated absorption coefficient demonstrates that as-grown films have selective absorption, with a broad transparent range, and possess a big energy gap (4.18 eV).
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Xinjiang Key Lab Elect Informat Mat & Devices, Urumqi 830011, Xinjiang, Peoples R China;Univ Chinese Acad Sci, Beijing 100049, Peoples R China
Wang, Hongguang,Xu, Jinbao,Ma, Chao,et al. Spectroscopic ellipsometry study of 0.5BaZr(0.2)Ti(0.8)O(3)-0.5Ba(0.7)Ca(0.3)TiO(3) ferroelectric thin films[J]. Journal of Alloys and Compounds,2014,615(12):526-530.