具有模拟量、开关量和频率输出的温度传感器(F元件)
宋世庚; 陶明德; 吴关炎; 丛秀云
2003-02-12
Rights Holder中国科学院新疆理化技术研究所
Date Available2013-11-27
Country中国
Subtype发明
Abstract本发明涉及一种具有模拟量、开关量和频率输出的温度传感器(F元件),该元件是用单面抛光的N型Si片制作,SI片电阻率在40到200Ωcm之间,其流程包括:氧化、光刻、硼预淀积、硼再分布和氧化、光刻、磷预淀积、磷再分布和氧化、刻引线孔、蒸铝、反刻铝、铝合金化、背面镀镍、划片、粘片、焊线、封装等。该元件制作工艺简单,成本低,应用方便,抗干扰能力强,适合于长距离传输。
Application Date1998-11-28
Patent NumberZL98124283.9
Status授权后放弃
Application Number98124283.9
Document Type专利
Identifierhttp://ir.xjipc.cas.cn/handle/365002/3203
Collection中国科学院新疆理化技术研究所(2002年以前数据)
Recommended Citation
GB/T 7714
宋世庚,陶明德,吴关炎,等. 具有模拟量、开关量和频率输出的温度传感器(F元件). ZL98124283.9[P]. 2003-02-12.
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