薄膜制备的喷雾热分解方法
宋世庚,武光明
2001-11-07
Rights Holder中国科学院新疆理化技术研究所
Date Available2013-11-27
Country中国
Subtype发明
Abstract本发明涉及一种薄膜制备的喷雾热分解方法,该方法首先配制所需金属盐溶液,然后经过压缩空气雾化器,使溶液雾化,在载流气体的带动下喷进放置有被加热基板的容器中,雾体经过烘烤后挥发去溶剂并进一步分解沉积在基板上成膜。该方法易于控制化学计量比,具有良好的取向性和外延性、成本低、不需多次镀膜,同时雾化时不发热,而且雾量稳定,不需冷却装置。该方法可制备金属氧化物薄膜。
Application Date1998-10-14
Patent NumberZL98119488.5
Status授权后放弃
Application Number98119488.5
Document Type专利
Identifierhttp://ir.xjipc.cas.cn/handle/365002/3201
Collection中国科学院新疆理化技术研究所(2002年以前数据)
Recommended Citation
GB/T 7714
宋世庚,武光明. 薄膜制备的喷雾热分解方法[P]. 2001-11-07.
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