Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films
Hao Xihong; Wang Peng; An Shengli; Xu Jingbao; Yue Zhenxing
2012
Source PublicationJournal of Alloys and Compounds
ISSN9258388
Volume519Issue:5Pages:37-40
Abstract

In this work, (Pb0.5Ba0.5)ZrO3 (PBZ) thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates after the starting sol was aged for 24, 192 and 528 h, respectively. The effects of aging time of sol on the microstructure and electrical properties of PBZ films were investigated systemically. The phase structure and surface micrograph of PBZ thin films were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. It was showed that all PBZ thin films had a pure cubic perovskite structure without obvious difference and that the surface roughness of films was decreased as the aging time of sol increasing. Electrical measurements illustrated that dielectric constant and dielectric loss of PBZ films were also gradually declined with the increase of aging time of sol. As a result, films with a longer aging time also had an improved figure of merit (FOM) value.

KeywordThin Films Crystal Growth Crystal Structure Electrical Properties
Subject AreaChemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
DOI10.1016/j.jallcom.2011.12.007
Indexed BySCI
WOS IDWOS:000300404000007
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.xjipc.cas.cn/handle/365002/1399
Collection新疆维吾尔自治区电子信息材料与器件重点实验室
AffiliationInner Mongolia Univ Sci & Technol, Sch Met & Mat, Baotou 014010, Peoples R China;Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang Key Lab Elect Informat Mat & Devices, Urumqi 830011, Peoples R China;Tsinghua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Recommended Citation
GB/T 7714
Hao Xihong,Wang Peng,An Shengli,et al. Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films[J]. Journal of Alloys and Compounds,2012,519(5):37-40.
APA Hao Xihong,Wang Peng,An Shengli,Xu Jingbao,&Yue Zhenxing.(2012).Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films.Journal of Alloys and Compounds,519(5),37-40.
MLA Hao Xihong,et al."Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films".Journal of Alloys and Compounds 519.5(2012):37-40.
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