Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films
Hao Xihong; Wang Peng; An Shengli; Xu Jingbao; Yue Zhenxing
2012
发表期刊Journal of Alloys and Compounds
ISSN9258388
卷号519期号:5页码:37-40
摘要

In this work, (Pb0.5Ba0.5)ZrO3 (PBZ) thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates after the starting sol was aged for 24, 192 and 528 h, respectively. The effects of aging time of sol on the microstructure and electrical properties of PBZ films were investigated systemically. The phase structure and surface micrograph of PBZ thin films were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. It was showed that all PBZ thin films had a pure cubic perovskite structure without obvious difference and that the surface roughness of films was decreased as the aging time of sol increasing. Electrical measurements illustrated that dielectric constant and dielectric loss of PBZ films were also gradually declined with the increase of aging time of sol. As a result, films with a longer aging time also had an improved figure of merit (FOM) value.

关键词Thin Films Crystal Growth Crystal Structure Electrical Properties
学科领域Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
DOI10.1016/j.jallcom.2011.12.007
收录类别SCI
WOS记录号WOS:000300404000007
引用统计
文献类型期刊论文
条目标识符http://ir.xjipc.cas.cn/handle/365002/1399
专题新疆维吾尔自治区电子信息材料与器件重点实验室
作者单位Inner Mongolia Univ Sci & Technol, Sch Met & Mat, Baotou 014010, Peoples R China;Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang Key Lab Elect Informat Mat & Devices, Urumqi 830011, Peoples R China;Tsinghua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
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Hao Xihong,Wang Peng,An Shengli,et al. Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films[J]. Journal of Alloys and Compounds,2012,519(5):37-40.
APA Hao Xihong,Wang Peng,An Shengli,Xu Jingbao,&Yue Zhenxing.(2012).Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films.Journal of Alloys and Compounds,519(5),37-40.
MLA Hao Xihong,et al."Effects of aging time of sol on the microstructure and electrical properties of (Pb0.5Ba0.5)ZrO3 thin films".Journal of Alloys and Compounds 519.5(2012):37-40.
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